Micromachining of alumina ceramic for microsystems applications: a systematic review, challenges and future opportunities
Author:
Affiliation:
1. Electrochemical Microfabrication Laboratory, Department of Mechanical Engineering, Indian Institute of Technology Bombay, Mumbai, India
Publisher
Informa UK Limited
Subject
Industrial and Manufacturing Engineering,Mechanical Engineering,Mechanics of Materials,General Materials Science
Link
https://www.tandfonline.com/doi/pdf/10.1080/10426914.2023.2290244
Reference273 articles.
1. Aluminum Oxide and Alumina Ceramics (review). Part 1. Properties of Al2O3 and Commercial Production of Dispersed Al2O3
2. Preparation of defect-free alumina insulation film using layer-by-layer electrohydrodynamic jet deposition for high temperature applications
3. Low κ, low loss alumina-glass composite with low CTE for LTCC microelectronic applications
4. Ceramic Mineral Waste-Forms for Nuclear Waste Immobilization
5. Femtosecond laser microstructuring of alumina toughened zirconia for surface functionalization of dental implants
Cited by 3 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. FSW of AA2024: effects of tool wear on energy consumption;Materials and Manufacturing Processes;2024-08-28
2. Introductory Chapter: Current Trends in Micromachining Technology;Industrial Engineering and Management;2024-05-29
3. Effect of Dielectric Constant Variation of High Purity Alumina Substrate on RF Performance;2024 International Conference on Integrated Circuits and Communication Systems (ICICACS);2024-02-23
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3