A facile and combined methodology to fabricate sputtered thin film micro-patterns for heater/sensor applications utilizing CO2 laser-cut masks-Reference-Cited by-同舟云学术

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A facile and combined methodology to fabricate sputtered thin film micro-patterns for heater/sensor applications utilizing CO2 laser-cut masks

Published:2021-06-23 Issue:9 Volume:37 Page:1133-1142
ISSN:0267-0844
Container-title:Surface Engineering
language:en
Short-container-title:Surface Engineering

Author:

Hasan Mohammed Adnan¹²^ORCID,Prajwal K.¹,Sahu Dwarika Nath¹,Prasad Arpana¹,Dey Arjun¹^ORCID,Rajendra A.¹

Affiliation:

1. Thermal Systems Group, U. R. Rao Satellite Centre (formerly ISRO Satellite Centre), Indian Space Research Organisation, Bangalore, India

2. Department of Mechanical Engineering, SRM Institute of Science and Technology (formerly SRM University), Chengalpattu, India

Publisher

Informa UK Limited

Subject

Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Link

https://www.tandfonline.com/doi/pdf/10.1080/02670844.2021.1942610

Reference45 articles.

1. Micro Humidity Sensor for Monitoring Water Flooding in a Proton Exchange Membrane Fuel Cell

2. MEMS-based microheaters integrated gas sensors

3. Technological Journey Towards Reliable Microheater Development for MEMS Gas Sensors: A Review

4. Advanced Micro- and Nano-Gas Sensor Technology: A Review

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1. Polyimide–nickel nanocomposites fabrication, properties, and applications: A review;REVIEWS ON ADVANCED MATERIALS SCIENCE;2023-01-01

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3. A critical review of copper electroless deposition on glass substrates for microsystems packaging applications;Surface Engineering;2022-06-03

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