Fabrication of GaAs micro-optical components using wet etching assisted femtosecond laser ablation-Reference-Cited by-同舟云学术

Fabrication of GaAs micro-optical components using wet etching assisted femtosecond laser ablation

Published:2020-11-27 Issue:20 Volume:67 Page:1516-1523
ISSN:0950-0340
Container-title:Journal of Modern Optics
language:en
Short-container-title:Journal of Modern Optics

Author:

Sun Xiaoyan¹,Zhou Fang¹,Dong Xinran¹,Zhang Fan¹,Liang Chang¹,Duan Lian¹,Hu Youwang¹,Duan Ji’an¹

Affiliation:

1. State Key Laboratory of High Performance and Complex Manufacturing, College of Mechanical and Electronic Engineering, Central South University, Changsha, People’s Republic of China

Funder

National Natural Science Foundation of China

Publisher

Informa UK Limited

Subject

Atomic and Molecular Physics, and Optics

Link

https://www.tandfonline.com/doi/pdf/10.1080/09500340.2020.1869849

Reference21 articles.

1. 800-nm femtosecond-laser-written core-and-cladding integrated fibre Bragg grating inscribed by line-by-line method through fibre coating

2. LIPSS formed on the sidewalls of microholes in stainless steel trepanned by a circularly polarized femtosecond laser

3. Chemical etching mechanism and properties of microstructures in sapphire modified by femtosecond laser

4. H-type microchannel fiber humidity sensor by femtosecond laser-induced water breakdown

5. Experimental research of laser-induced periodic surface structures in a typical liquid by a femtosecond laser

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