Two-dimensional modelling of systematic surface height deviations in optical interference microscopy based on rigorous near field calculation-Reference-Cited by-同舟云学术

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Two-dimensional modelling of systematic surface height deviations in optical interference microscopy based on rigorous near field calculation

Published:2020-06-24 Issue:11 Volume:67 Page:963-973
ISSN:0950-0340
Container-title:Journal of Modern Optics
language:en
Short-container-title:Journal of Modern Optics

Author:

Pahl Tobias¹,Hagemeier Sebastian¹,Hüser Lucie¹,Xie Weichang²,Lehmann Peter¹

Affiliation:

1. Measurement Technology Group, Faculty of Electrical Engineering and Computer Science, University of Kassel, Kassel, Germany

2. Former Member of Measurement Technology Group, Faculty of Electrical Engineering and Computer Science, University of Kassel, Kassel, Germany

Funder

Deutsche Forschungsgemeinschaft

Publisher

Informa UK Limited

Subject

Atomic and Molecular Physics, and Optics

Link

https://www.tandfonline.com/doi/pdf/10.1080/09500340.2020.1801871

Reference58 articles.

1. Fringe modulation skewing effect in white-light vertical scanning interferometry

2. Signal modeling in low coherence interference microscopy on example of rectangular grating

3. Surface measurement errors using commercial scanning white light interferometers

4. Usage of polarization for high-accuracy micrometrology sensors

5. Signal formation in depth-scanning 3D interference microscopy at high numerical apertures

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