1. Measurement Technology and Instrument Key Lab of Hebei Province, Yanshan University, Qinhuangdao, People’s Republic of China
2. College of Information Science and Engineering, Northeastern University, Shenyang, People’s Republic of China
3. Hebei Key Laboratory of Micro-Nano Precision Optical Sensing and Measurement Technology, Qinhuangdao, People’s Republic of China
4. College of Information & Control Engineering, Shenyang Jianzhu University, Shenyang, People’s Republic of China
5. Melbourne Centre for Nanofabrication, Victorian Node of the Australian National Fabrication Facility, Clayton, Australia