Simultaneous determination of the thermal expansion coefficient and the elastic modulus of Ta2O5thin film using phase shifting interferometry
Author:
Publisher
Informa UK Limited
Subject
Atomic and Molecular Physics, and Optics
Link
http://www.tandfonline.com/doi/pdf/10.1080/09500340008231417
Reference36 articles.
1. Refractive‐index‐adjustable SiO2‐Ta2O5films for integrated optical circuits
2. Wavelength multiplexer based on SiO/sub 2/-Ta/sub 2/O/sub 5/ arrayed-waveguide grating
3. Optical Propagation in Sheet and Pattern Generated Films of Ta_2O_5
4. UV-O/sub 3/ and dry-O/sub 2/: Two-step-annealed chemical vapor-deposited Ta/sub 2/O/sub 5/ films for storage dielectrics of 64-Mb DRAMs
5. Temperature stability of thin-film narrow-bandpass filters produced by ion-assisted deposition
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