Investigation on Ablation Characteristics and Material Removal Mechanism of Si<sub>3</sub>N<sub>4</sub> Ceramics by a New Type of Coupled Laser Beam-Reference-Cited by-同舟云学术

Investigation on Ablation Characteristics and Material Removal Mechanism of Si₃N₄ Ceramics by a New Type of Coupled Laser Beam

Published:2022-10-06 Issue:1 Volume:230 Page:61-77
ISSN:1058-4587
Container-title:Integrated Ferroelectrics
language:en
Short-container-title:Integrated Ferroelectrics

Author:

Zhang Xuanhua¹²,Chen Xiaoxiao¹³,Huang Lirong²,Chen Tao¹²,Ma Guiying¹⁴,Zhang Wenwu¹³

Affiliation:

1. Ningbo Institute of Materials Technology and Engineering, Chinese Academy of Sciences, Zhejiang Provincial Key Laboratory of Aero Engine Extreme Manufacturing Technology, Ningbo, Zhejiang, China

2. School of Mechanical and Electrical Engineering, Jiangxi University of Science and Technology, Ganzhou, Jiangxi, China

3. University of Chinese Academy of Sciences, Beijing, China

4. School of Mechanical Engineering and Mechanics, Ningbo University, Ningbo, Zhejiang, China

Funder

Natural Science Foundation of Zhejiang Province

Zhejiang Provincial Key Research and Development

"Science and Technology Innovation 2025" Major Project of Ningbo City

Publisher

Informa UK Limited

Subject

Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Ceramics and Composites,Control and Systems Engineering,Electronic, Optical and Magnetic Materials

Link

https://www.tandfonline.com/doi/pdf/10.1080/10584587.2022.2102799

Reference33 articles.

1. Laser drilling of structural ceramics—A review

2. Promising high-thermal-conductivity substrate material for high-power electronic device: silicon nitride ceramics

3. High thermal conductivity silicon nitride ceramics prepared by pressureless sintering with ternary sintering additives

4. Mechanisms of toughening in silicon nitrides: The roles of crack bridging and microstructure

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