Sputtering of Al2O3 and LiNbO3 in the electronic stopping region

Author:

Yuanxun Qiu 1,Griffith J. E.12,Tombrello T. A.1

Affiliation:

1. a W. K. Kellogg Radiation Laboratory, California Institute of Technology , Pasadena, California, 91125

2. b Department of Modern Physics , Lanzhou University , Lanzhou, China.

Publisher

Informa UK Limited

Subject

General Engineering

Cited by 31 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. Angular distribution of the sputtered atoms from UO2 under high electronic stopping power irradiation;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1998-05

2. Electronic stopping power threshold of sputtering in yttrium iron garnet;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1996-02

3. MeV He ion impact desorption of hydrogen isotopes from an InP(001)-p(1 × 1) surface;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1995-06

4. Sputtering yields of thin films for MeV microbeam irradiation: Preliminary results;Radiation Effects and Defects in Solids;1994-12

5. Energy and angular distributions of sputtered particles;International Journal of Mass Spectrometry and Ion Processes;1994-12

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