Fault diagnosis expert system of semiconductor manufacturing equipment using a Bayesian network
Author:
Publisher
Informa UK Limited
Subject
Electrical and Electronic Engineering,Computer Science Applications,Mechanical Engineering,Aerospace Engineering
Link
http://www.tandfonline.com/doi/pdf/10.1080/0951192X.2013.812803
Reference21 articles.
1. Using Bayesian networks for root cause analysis in statistical process control
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