A model-based clustering approach to the recognition of the spatial defect patterns produced during semiconductor fabrication
Author:
Affiliation:
1. a Department of Industrial and Information Engineering , The University of Tennessee, Knoxville , Knoxville , TN , 37996 , USA
Publisher
Informa UK Limited
Subject
Industrial and Manufacturing Engineering
Link
https://www.tandfonline.com/doi/pdf/10.1080/07408170701592556
Reference20 articles.
1. Ice Floe Identification in Satellite Images Using Mathematical Morphology and Clustering about Principal Curves
2. Model-Based Gaussian and Non-Gaussian Clustering
3. Choosing the Number of Component Clusters in the Mixture-Model Using a New Informational Complexity Criterion of the Inverse-Fisher Information Matrix
4. Linear flaw detection in woven textiles using model-based clustering
Cited by 35 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Implementation of Silicon Wafer Defect Classification Web application using Deep Learning;2024 International Conference on Advancements in Power, Communication and Intelligent Systems (APCI);2024-06-21
2. Development of a spatial dimension-based taxonomy for classifying the defect patterns in a wafer bin map;Advanced Engineering Informatics;2024-04
3. Graph Distance and Adaptive K-Nearest Neighbors Selection-Based Density Peak Clustering;IEEE Access;2024
4. Development of taxonomy for classifying defect patterns on wafer bin map using Bin2Vec and clustering methods;Computers in Industry;2023-11
5. Research on fast marking method for indicator diagram of pumping well based on K-means clustering;Heliyon;2023-10
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3