Atmospheric Pressure Linear Microwave Plasma for Surface Treatment of Materials
Author:
Affiliation:
1. Plasma Research Laboratory Co.LTD.
2. Department of Electrical and Electronic Engineering, Tokai University
Publisher
The Vacuum Society of Japan
Subject
Spectroscopy,Surfaces and Interfaces,Instrumentation,General Materials Science
Link
https://www.jstage.jst.go.jp/article/jvsj2/60/3/60_16-RV-048/_pdf
Reference45 articles.
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3. 3) M. Murata, Y. Takeuchi, E. Sasagawa and K. Hamamoto: Rev. Sci. Instrum., 67 (1996) 1542.
4. 4) Y. Takeuchi, Y. Nawata, K. Ogawa, A. Serizawa, Y. Yamauchi and M. Murata: Thin Solid Films, 386 (2001) 133.
5. 5) D. Krzec, M. Mildner, F. Hillemann and J. Engemann: Surf. Coat. Technol., 97 (1997) 759.
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