Interfacial chemistry and electronic structure of epitaxial lattice-matched TiN/Al0.72Sc0.28N metal/semiconductor superlattices determined with soft x-ray scattering-Reference-Cited by-同舟云学术

Interfacial chemistry and electronic structure of epitaxial lattice-matched TiN/Al0.72Sc0.28N metal/semiconductor superlattices determined with soft x-ray scattering

Published:2020-09 Issue:5 Volume:38 Page:053201
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A
language:en
Short-container-title:Journal of Vacuum Science & Technology A

Author:

Biswas Bidesh¹²^ORCID,Nayak Sanjay¹^ORCID,Bhatia Vijay³,Pillai Ashalatha Indiradevi Kamalasanan³,Garbrecht Magnus³^ORCID,Modi Mohammed H.⁴⁵,Gupta Mukul⁶,Saha Bivas¹²⁷^ORCID

Affiliation:

1. Chemistry and Physics of Materials Unit, Jawaharlal Nehru Centre for Advanced Scientific Research, Bangalore 560064, India

2. International Centre for Materials Science, Jawaharlal Nehru Centre for Advanced Scientific Research, Bangalore 560064, India

3. Australian Centre for Microscopy and Microanalysis, The University of Sydney, Camperdown 2006, New South Wales, Australia

4. Raja Ramanna Centre for Advanced Technology, Indore 452013, India

5. Homi Bhabha National Institute, Training School Complex, Anushakti Nagar, Mumbai 400094, India

6. UGC-DAE Consortium for Scientific Research, University Campus, Khandwa Road, Indore 452001, India

7. School of Advanced Materials (SAMat), Jawaharlal Nehru Centre for Advanced Scientific Research, Bangalore 560064, India

Funder

International Center for Materials Science

Sydney Microscopy & Microanalysis, The University of Sydney

Science and Engineering Research Board

Sheikh Saqr Laboratory

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Link

http://avs.scitation.org/doi/pdf/10.1116/6.0000180

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