Author:
Buchwald Walter R.,Vaccaro Kenneth
Cited by
7 articles.
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1. Positive-tone chemically amplified photosensitive polyimides with controllable taper angles;Materials Today Chemistry;2023-07
2. Hematological, serum biochemical, and immunological responses in common carp (Cyprinus carpio) exposed to phosalone;Comparative Clinical Pathology;2014-04-30
3. Low-pressure inductively coupled plasma etching of benzocyclobutene with SF6/O2 plasma chemistry;Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena;2012-11
4. Thick benzocyclobutene etching using high density SF6/O2 plasmas;Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena;2011-01
5. Characterization of reactive ion etching of benzocyclobutente in SF6/O2 plasmas;Microelectronic Engineering;2010-10