SIMS measurement of hydrogen and deuterium detection limits in silicon: Comparison of different SIMS instrumentation-Reference-Cited by-同舟云学术

SIMS measurement of hydrogen and deuterium detection limits in silicon: Comparison of different SIMS instrumentation

Published:2016-05 Issue:3 Volume:34 Page:03H103
ISSN:2166-2746
Container-title:Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
language:en
Short-container-title:Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena

Author:

Stevie Fred A.,Zhou Chaunzhen,Hopstaken Marinus,Saccomanno Michael,Zhang Zhichun,Turansky Andrew

Publisher

American Vacuum Society

Subject

Materials Chemistry,Electrical and Electronic Engineering,Surfaces, Coatings and Films,Process Chemistry and Technology,Instrumentation,Electronic, Optical and Magnetic Materials

Link

http://avs.scitation.org/doi/pdf/10.1116/1.4940151

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