Numerical modeling of electron transport in a cylindrical cell
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Published:1999
Issue:1
Volume:17
Page:68
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ISSN:0734-211X
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Container-title:Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
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language:en
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Short-container-title:J. Vac. Sci. Technol. B
Author:
Fedirko V. A.,Belova N. G.
Publisher
American Vacuum Society
Subject
General Engineering