Performance characterization of nonevaporable porous Ti getter films-Reference-Cited by-同舟云学术

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Performance characterization of nonevaporable porous Ti getter films

Published:2007 Issue:5 Volume:25 Page:1373
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
language:en
Short-container-title:J. Vac. Sci. Technol. A

Author:

Li Chien-Cheng,Huang Jow-Lay,Lin Ran-Jin,Lii Ding-Fwu,Chen Chia-Hao

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Cited by 12 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Study of nano-scaffold on improving gettering performance of Ti-Zr-V film and the influencing mechanism;Materials Today Communications;2024-06

2. Effects of Deposition Pressure on the Microstructural and Tribological Properties of CrAgCeN Coatings Prepared by Magnetron Sputtering;Materials;2023-01-29

3. Preparation and Properties Characterization of Nano-Composite Scaffold Getter With Induction Heating;IEEE Transactions on Nanotechnology;2022

4. Influence of the sputtering glancing angle on the microstructure and adsorption characteristics of Zr-Co-RE getter films;Materials Research Express;2020-03-01

5. Influence of deposition pressure, substrate temperature and substrate outgassing on sorption properties of Zr–Co–Ce getter films;Journal of Alloys and Compounds;2016-03

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