Amorphization of Si(100) by Ar+-ion bombardment studied with spectroscopic and time-resolved second-harmonic generation-Reference-Cited by-同舟云学术

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Amorphization of Si(100) by Ar+-ion bombardment studied with spectroscopic and time-resolved second-harmonic generation

Published:2010-03 Issue:2 Volume:28 Page:293-301
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
language:en
Short-container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

Author:

Gevers P. M.,Gielis J. J. H.,Beijerinck H. C. W.,van de Sanden M. C. M.,Kessels W. M. M.

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Link

http://avs.scitation.org/doi/pdf/10.1116/1.3305812

Cited by 8 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Study of the dependence of the degree of disordering of the surface layers of Si(111) and Ge(111) single crystals upon bombardment with low-energy ions;Eurasian Journal of Physics and Functional Materials;2023-12-20

2. Near-surface damage and mixing in Si-Cl2-Ar atomic layer etching processes: Insights from molecular dynamics simulations;Journal of Vacuum Science & Technology A;2023-06-15

3. Status and perspectives of transparent conductive oxide films for silicon heterojunction solar cells;Materials Today Nano;2023-06

4. Influence of the spatial extent of the space-charge region in c-Si on the electric-field-induced second-harmonic-generation effect;Journal of the Optical Society of America B;2021-05-12

5. The energy distribution function of ions impinging on nanoparticles in a collisional low-pressure plasma;Plasma Sources Science and Technology;2012-05-02

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