Abstract: Composition profiling—a comparison of surface analysis techniques vs methods involving the detection of sputtered species
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Published:1975-01
Issue:1
Volume:12
Page:403-403
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ISSN:0022-5355
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Container-title:Journal of Vacuum Science and Technology
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language:en
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Short-container-title:Journal of Vacuum Science and Technology
Author:
Coburn J. W.,Kay Eric
Publisher
American Vacuum Society
Subject
General Engineering
Cited by
4 articles.
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1. Early example of an interdisciplinary approach in industry: Harold F. Winters's contributions;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;2017-09
2. Sputter-depth profiling for thin-film analysis;Philosophical Transactions of the Royal Society of London. Series A: Mathematical, Physical and Engineering Sciences;2003-11-25
3. Application of Auger and Photoelectron Spectroscopy to Electrochemical Problems;Modern Aspects of Electrochemistry;1979
4. The influence of selective sputtering on surface composition;Surface Science;1976-07