Slow positron annihilation spectroscopy and electron microscopy of electron beam evaporated cobalt and nickel silicides
Author:
Publisher
American Vacuum Society
Subject
Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics
Link
http://avs.scitation.org/doi/pdf/10.1116/1.576565
Cited by 4 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Magnetron Sputtered SnOxFilms on Tin Probed by Slow Positron Implantation Spectroscopy;Acta Physica Polonica A;1999-04
2. INVESTIGATION OF THE EFFECT OF OXYGEN AND SUBSTRATE BIAS ON THE DEFECT STRUCTURE OF SPUTTER-DEPOSITED SnOX FILMS;Scripta Materialia;1997-12
3. Defects in sputter-deposited aluminium films, studied by X-ray diffraction and positron annihilation;Scripta Metallurgica et Materialia;1995-08
4. Structure and defect characterization of epitaxial CoSi2 on Si(001) formed using an amorphous Co75W25 sputtered layer;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;1993-09
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