On evaporation via an inclined rotating circular lift-off shadow or stencil mask-Reference-Cited by-同舟云学术

On evaporation via an inclined rotating circular lift-off shadow or stencil mask

Published:2019-01 Issue:1 Volume:37 Page:011602
ISSN:2166-2746
Container-title:Journal of Vacuum Science & Technology B
language:en
Short-container-title:Journal of Vacuum Science & Technology B

Author:

Arscott Steve¹^ORCID

Affiliation:

1. Institut d’Electronique, de Microélectronique et de Nanotechnologie (IEMN), CNRS UMR8520, University of Lille, Cité Scientifique, Avenue Poincaré, 59652 Villeneuve d’Ascq, France

Funder

Agence Nationale de la Recherche

Région Hauts-de-France

Publisher

American Vacuum Society

Subject

Materials Chemistry,Electrical and Electronic Engineering,Surfaces, Coatings and Films,Process Chemistry and Technology,Instrumentation,Electronic, Optical and Magnetic Materials

Link

http://avs.scitation.org/doi/pdf/10.1116/1.5057404

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