Ultraviolet laser-induced interaction of Cl2 with GaAs(110)-Reference-Cited by-同舟云学术

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Ultraviolet laser-induced interaction of Cl2 with GaAs(110)

Published:1992-01 Issue:1 Volume:10 Page:206
ISSN:0734-211X
Container-title:Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
language:
Short-container-title:J. Vac. Sci. Technol. B

Author:

Haase G.

Publisher

American Vacuum Society

Subject

General Engineering

Cited by 9 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Spin polarization and the energetics of chlorine adsorption on the GaAs(110) surface;The Journal of Chemical Physics;1998-10-22

2. Laser interaction with Br-GaAs(110): Etching and atomic desorption;Physical Review B;1998-10-15

3. Pulsed-laser-induced etching of BrGaAs(110);Surface Science;1997-06

4. Chemical dry etching mechanisms of GaAs surface by HCl and Cl2;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;1996-09

5. The temperature dependence of the Cl2/GaAs(110) surface product distribution;The Journal of Chemical Physics;1996-01

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