Investigation of Si-doped diamond-like carbon films synthesized by plasma immersion ion processing-Reference-Cited by-同舟云学术

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Investigation of Si-doped diamond-like carbon films synthesized by plasma immersion ion processing

Published:2000 Issue:5 Volume:18 Page:2143
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
language:en
Short-container-title:J. Vac. Sci. Technol. A

Author:

He X. M.,Walter K. C.,Nastasi M.,Lee S.-T.,Fung M. K.

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Cited by 45 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

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4. Effect of chromium doping on high temperature tribological properties of silicon-doped diamond-like carbon films;Tribology International;2020-12

5. Effect of the plasma confinement on properties of a-C:H:SiOx films grown by plasma enhanced chemical vapor deposition;Journal of Vacuum Science & Technology A;2019-12

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