Low-energy sputtering yields of tungsten and tantalum
Author:
Publisher
American Vacuum Society
Subject
Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics
Link
http://avs.scitation.org/doi/pdf/10.1116/1.2110385
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3. Sputtering of Tungsten by Beryllium and Neon Ions;Technical Physics Letters;2020-12
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