Reactivity of heterogeneous surfaces: Modeling precursor–surface interaction using absorbing Markov chains
Author:
Affiliation:
1. Applied Materials Division, Argonne National Laboratory, Lemont, Illinois 60439
Funder
U.S. Department of Energy
Publisher
American Vacuum Society
Subject
Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics
Link
http://avs.scitation.org/doi/am-pdf/10.1116/1.5034178
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