Microstructure evolution in TiN films reactively sputter deposited on multiphase substrates
Author:
Publisher
American Vacuum Society
Subject
Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics
Link
http://avs.scitation.org/doi/pdf/10.1116/1.573868
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3. Effects of incident N atom kinetic energy on TiN/TiN(001) film growth dynamics: A molecular dynamics investigation;Journal of Applied Physics;2017-01-14
4. Large-scale molecular dynamics simulations of TiN/TiN(001) epitaxial film growth;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;2016-07
5. N and Ti adatom dynamics on stoichiometric polar TiN(111) surfaces;Surface Science;2016-07
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