Study of ZrO2 thin films for gate oxide applications-Reference-Cited by-同舟云学术

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Study of ZrO2 thin films for gate oxide applications

Published:2001-07 Issue:4 Volume:19 Page:1720-1724
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
language:en
Short-container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

Author:

Nam Seok-Woo,Yoo Jung-Ho,Kim Hae-Young,Kang Sung-Kwan,Ko Dae-Hong,Yang Cheol-Woong,Lee Hoo-Jeong,Cho Mann-Ho,Ku Ja-Hum

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Link

http://avs.scitation.org/doi/pdf/10.1116/1.1351802

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