Patterning of circular structure arrays with interference lithography
Author:
Publisher
American Vacuum Society
Subject
General Engineering
Cited by 22 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Coherent Lithography with Tabletop Soft X-Ray Lasers: Latest Achievements and Prospects;Springer Proceedings in Physics;2018
2. Invited Article: Progress in coherent lithography using table-top extreme ultraviolet lasers;Review of Scientific Instruments;2015-12
3. Tilted and axis-shift Lloyd's mirror system for recording low-density and large-area holographic grating;Optik;2014-02
4. Breakthroughs in photonics 2012: Nano-structuring and nano-fabrication enabled by extreme ultraviolet laser sources;IEEE Photonics Journal;2013-04
5. Fabrication of periodic photonic microstructures by the interference of ultrashort pulse laser beams;Laser Growth and Processing of Photonic Devices;2012
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