Phase transformation and light emission in Er-doped Si-rich HfO2 films prepared by magnetron sputtering-Reference-Cited by-同舟云学术

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Phase transformation and light emission in Er-doped Si-rich HfO2 films prepared by magnetron sputtering

Published:2019-05 Issue:3 Volume:37 Page:031503
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A
language:en
Short-container-title:Journal of Vacuum Science & Technology A

Author:

Torchynska Tetyana¹^ORCID,El Filali Brahim²,Khomenkova Larysa³⁴^ORCID,Portier Xavier⁵,Gourbilleau Fabrice⁵

Affiliation:

1. Instituto Politécnico Nacional—ESFM, Av. IPN, México City 07738, Mexico

2. Instituto Politécnico Nacional—UPIITA, Av. IPN, México City 07320, Mexico

3. V. Lashkaryov Institute of Semiconductor Physics at NASU, 45 Pr. Nauky, Kyiv 03028, Ukraine

4. Physics Department, National University “Kyiv-Mohyla Academy,” 2 Skovorody str., Kyiv 04170, Ukraine

5. CIMAP/UMR CNRS/CEA/ENSICAEN/UNICAEN, Bd. Marechal Juin, 4050 Caen Cedex 4, France

Funder

CONACYT | Mexico

Europien Regional Development Fund

National Academy of Science of Ukraine

SIP-IPN Mexico

Ministry of Education and Science of Ukraine

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Link

http://avs.scitation.org/doi/pdf/10.1116/1.5085143

Cited by 6 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Two excitation pathways of Pr3+ ion emission in HfO2:Si:Pr films depending on crystalline phase transformations in annealing;Journal of Luminescence;2023-06

2. Enhancement of sensitized photoluminescence of erbium chloride silicate through regulating annealing;Journal of Rare Earths;2022-09

3. Formation of translucent nanostructured zirconia ceramics;Journal of the European Ceramic Society;2021-10

4. Raman scattering, emission and crystalline phase evolutions in Nd-doped Si-rich HfO2:N films;Journal of Materials Science: Materials in Electronics;2021-06-03

5. Annealing impact on emission and phase varying of Nd-doped Si-rich-HfO2 films prepared by RF magnetron sputtering;Journal of Materials Science: Materials in Electronics;2020-02-07

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