Langmuir probe diagnostics of a radio frequency magnetron discharge for deposition of high Tc YBCO films
Author:
Publisher
American Vacuum Society
Subject
Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics
Link
http://avs.scitation.org/doi/pdf/10.1116/1.578636
Cited by 7 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. The Influence of Hydrophobic Counterion on the Phase Behavior of Ionic Surfactants;Tenside Surfactants Detergents;2005-04-01
2. Self-consistent particle modelling of dc magnetron discharges of an O2/Ar mixture;Journal of Physics D: Applied Physics;2000-09-01
3. Relationship between plasma parameters and film microstructure in radio frequency magnetron sputter deposition of barium strontium titanate;Journal of Applied Physics;1998-01-15
4. Plasma characteristics at off-axis high pressure magnetron YBa2Cu3O7−δ sputtering;Journal of Applied Physics;1997-08-15
5. In situ grown superconducting YBCO films on buffered silicon substrates for device applications;Journal of Superconductivity;1996-04
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