Investigation of the void structure in amorphous germanium thin films as a function of low‐energy ion bombardment-Reference-Cited by-同舟云学术

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Investigation of the void structure in amorphous germanium thin films as a function of low‐energy ion bombardment

Published:1988-05 Issue:3 Volume:6 Page:1631-1635
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
language:en
Short-container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

Author:

Yehoda J. E.,Yang B.,Vedam K.,Messier R.

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Link

http://avs.scitation.org/doi/pdf/10.1116/1.575341

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