Predicting radiation-induced carbon contamination of EUV optics-Reference-Cited by-同舟云学术

Predicting radiation-induced carbon contamination of EUV optics

Published:2019-03 Issue:2 Volume:37 Page:021602
ISSN:2166-2746
Container-title:Journal of Vacuum Science & Technology B
language:en
Short-container-title:Journal of Vacuum Science & Technology B

Author:

Hollenshead Jeromy T.¹,Klebanoff Leonard E.²,Delgado Gil³

Affiliation:

1. Sandia National Laboratories, Albuquerque, New Mexico 87185

2. Sandia National Laboratories, Livermore, California 94551

3. KLA-Tencor Corporation, 5 Technology Drive, Milpitas, California 95035

Funder

KLA-Tencor/Sandia CRADA

Publisher

American Vacuum Society

Subject

Materials Chemistry,Electrical and Electronic Engineering,Surfaces, Coatings and Films,Process Chemistry and Technology,Instrumentation,Electronic, Optical and Magnetic Materials

Link

http://avs.scitation.org/doi/pdf/10.1116/1.5072797

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