A cryosorption pumped rapid cycle UHV system
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Published:1981-05
Issue:1
Volume:19
Page:122-123
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ISSN:0022-5355
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Container-title:Journal of Vacuum Science and Technology
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language:en
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Short-container-title:Journal of Vacuum Science and Technology
Author:
Visser J.,Scheer J. J.
Publisher
American Vacuum Society
Subject
General Engineering
Cited by
2 articles.
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1. Cryopumping;Capture Pumping Technology;2001
2. Vacuum systems for microelectronics;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;1983-04