Electrical characterization of metal–oxide–semiconductor capacitors with anodic and plasma-nitrided oxides-Reference-Cited by-同舟云学术

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Electrical characterization of metal–oxide–semiconductor capacitors with anodic and plasma-nitrided oxides

Published:2000-03 Issue:2 Volume:18 Page:676-680
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
language:en
Short-container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

Author:

Landsberger L. M.,Ghayour R.,Sayedi M.,Kahrizi M.,Landheer D.,Bardwell J. A.,Riopel Y.,Jean C.,Logiudice V.

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Link

http://avs.scitation.org/doi/pdf/10.1116/1.582250

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