Plasma-induced damage of GaAs pn-junction diodes using electron cyclotron resonance generated Cl2/Ar, BCl3/Ar, Cl2/BCl3/Ar, and SiCl4/Ar plasmas-Reference-Cited by-同舟云学术

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Plasma-induced damage of GaAs pn-junction diodes using electron cyclotron resonance generated Cl2/Ar, BCl3/Ar, Cl2/BCl3/Ar, and SiCl4/Ar plasmas

Published:1995-01 Issue:1 Volume:13 Page:27
ISSN:0734-211X
Container-title:Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
language:
Short-container-title:J. Vac. Sci. Technol. B

Author:

Shul R. J.

Publisher

American Vacuum Society

Subject

General Engineering

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