Fabrication of air bridges using electron beam lithography
Author:
Publisher
American Vacuum Society
Subject
General Engineering
Cited by 8 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Design and fabrication of a micro-opto-mechanical-systems accelerometer based on intensity modulation of light fabricated by a modified deep-reactive-ion-etching process using silicon-on-insulator wafer;Journal of Vacuum Science & Technology B;2022-07
2. Recent advances in focused ion beam nanofabrication for nanostructures and devices: fundamentals and applications;Nanoscale;2021
3. Fabrication recipe for nanoscale suspended gold structures such as mushrooms and air bridges used in optical metasurfaces;Journal of the Optical Society of America B;2016-01-19
4. Diffractive characterization of the vibrational state of an array of microcantilevers;Optical Engineering;2013-04-30
5. Simple e-beam air-bridge technology for mm-wave applications;Microelectronic Engineering;2012-10
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