Author:
O’Hanlon John F.,Shieh Jhy‐Jer
Subject
Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics
Cited by
8 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Rough Vacuum Pumping;A Users Guide to Vacuum Technology;2023-11-20
2. Modeling a Wet Wafer Surface Processing Chain;2023 IEEE International Interconnect Technology Conference (IITC) and IEEE Materials for Advanced Metallization Conference (MAM)(IITC/MAM);2023-05
3. Vacuum Techniques And Instrumentation;digital Encyclopedia of Applied Physics;2003-04-15
4. Photon-stimulated desorption from an aluminum surface after water vapor exposure;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;2002-05
5. Water vapor in vacuum systems;Vacuum;1996-04