Homogeneity characterization of a large microwave plasma-Reference-Cited by-同舟云学术

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Homogeneity characterization of a large microwave plasma

Published:1997-05 Issue:3 Volume:15 Page:668-672
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
language:en
Short-container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

Author:

Béchu S.,Boisse-Laporte C.,Leprince P.,Marec J.

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Link

http://avs.scitation.org/doi/pdf/10.1116/1.580703

Cited by 12 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. 3-D Numerical Characterization of a Microwave Argon PECVD Plasma Reactor at Low Pressure;IEEE Transactions on Plasma Science;2016-12

2. Introduction of Primary Amino Groups on Poly(ethylene terephthalate) Surfaces by Ammonia and a Mix of Nitrogen and Hydrogen Plasma;Plasma Chemistry and Plasma Processing;2011-12-23

3. Double Plasma Treatment-Induced Graft Polymerization of Carbohydrated Monomers on Poly(ethylene terephthalate) Fibers;Langmuir;2007-08-21

4. Characteristics of Microwave Discharge in a Modified Surfaguide with a Large Diameter;Chinese Physics Letters;2003-09-24

5. Structure and properties of silicon oxide films deposited in a dual microwave-rf plasma reactor;Thin Solid Films;2001-03

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