Experimental results of the stochastic Coulomb interaction in ion projection lithography-Reference-Cited by-同舟云学术

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Experimental results of the stochastic Coulomb interaction in ion projection lithography

Published:1999 Issue:6 Volume:17 Page:3098
ISSN:0734-211X
Container-title:Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
language:en
Short-container-title:J. Vac. Sci. Technol. B

Author:

de Jager P. W. H.,Derksen G.,Mertens B.,Cekan E.,Lammer G.,Vonach H.,Buschbeck H.,Zeininger M.,Horner C.,Löschner H.,Stengl G.,Bleeker A. J.,Benschop J.,Shi F.,Volland B.,Hudek P.,Heerlein H.,Rangelow I. W.,Kaesmaier R.

Publisher

American Vacuum Society

Subject

General Engineering

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