Flexible composite stamp for thermal nanoimprint lithography based on OrmoStamp-Reference-Cited by-同舟云学术

Flexible composite stamp for thermal nanoimprint lithography based on OrmoStamp

Published:2015-11 Issue:6 Volume:33 Page:06F601
ISSN:2166-2746
Container-title:Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
language:en
Short-container-title:Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena

Author:

Papenheim Marc¹,Steinberg Christian¹,Dhima Khalid¹,Wang Si¹,Scheer Hella-Christin¹

Affiliation:

1. Microstructure Engineering, University of Wuppertal, Rainer-Gruenter-Str. 21, D-42119 Wuppertal, Germany

Funder

Deutsche Forschungsgemeinschaft (DFG)

Publisher

American Vacuum Society

Subject

Materials Chemistry,Electrical and Electronic Engineering,Surfaces, Coatings and Films,Process Chemistry and Technology,Instrumentation,Electronic, Optical and Magnetic Materials

Link

http://avs.scitation.org/doi/pdf/10.1116/1.4929885

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