Enhancement of silicon nitridation by alkali metals-Reference-Cited by-同舟云学术

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Enhancement of silicon nitridation by alkali metals

Published:1988-05 Issue:3 Volume:6 Page:1535-1538
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
language:en
Short-container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

Author:

Soukiassian P.,Bakshi M. H.,Starnberg H. I.,Hurych Z.,Gentle T. M.,Schuette K. P.

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Link

http://avs.scitation.org/doi/pdf/10.1116/1.575357

Cited by 10 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Radially non-uniform interaction of nitrogen with silicon wafers;Journal of Materials Science: Materials in Electronics;2008-03-04

2. A metastable-induced electron spectroscopy study on the promotion of nitridation by oxygen/alkali pre-adsorbates at Si(100) surfaces;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2002-06

3. Sodium-assisted nitrogen adsorption on Si(001) surfaces at room temperature studied by metastable de-excitation spectroscopy;Surface Science;2002-06

4. The effect of temperature on NH3–Si(111) interaction;Surface Science;1998-05

5. A molecular beam study of the reaction of N 2 at clean and sodium covered Si(100) surfaces;Surface Science;1995-07

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