Adsorption and reactions of tetrabutoxysilane (TBOS) on Si(100)
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Published:2005-07
Issue:4
Volume:23
Page:613-616
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ISSN:0734-2101
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Container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
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language:en
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Short-container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
Author:
Lee Nakyung,Yong Kijung,Jeong Hyun Suk,Kim Chang Min
Publisher
American Vacuum Society
Subject
Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics