Local bonding of oxygen and hydrogen in a‐Si:H:O thin films-Reference-Cited by-同舟云学术

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Local bonding of oxygen and hydrogen in a‐Si:H:O thin films

Published:1983-04 Issue:2 Volume:1 Page:313-316
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
language:en
Short-container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

Author:

Lucovsky G.,Pollard W. B.

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Link

http://avs.scitation.org/doi/pdf/10.1116/1.572121

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