Vapor-phase grafting of functional silanes on atomic layer deposited Al2O3

Author:

Rozyyev Vepa123ORCID,Shevate Rahul2ORCID,Pathak Rajesh2ORCID,Murphy Julia G.34ORCID,Mane Anil U.23ORCID,Sibener S. J.34ORCID,Elam Jeffrey W.23ORCID

Affiliation:

1. Pritzker School of Molecular Engineering, The University of Chicago 1 , 5640 S. Ellis Ave Chicago, Illinois 60637

2. Applied Materials Division, Argonne National Laboratory 2 , Lemont, Illinois 60439

3. 3 Advanced Materials for Energy-Water Systems (AMEWS) Energy Frontier Research Center (EFRC), Lemont, Illinois 60439

4. 4 The James Franck Institute and Department of Chemistry, The University of Chicago, 929 E. 57th Street, Chicago, Illinois 60637

Abstract

Fundamental studies are needed to advance our understanding of selective adsorption in aqueous environments and develop more effective sorbents and filters for water treatment. Vapor-phase grafting of functional silanes is an effective method to prepare well-defined surfaces to study selective adsorption. In this investigation, we perform vapor phase grafting of five different silane compounds on aluminum oxide (Al2O3) surfaces prepared by atomic layer deposition. These silane compounds have the general formula L3Si–C3H6–X where the ligand, L, controls the reactivity with the hydroxylated Al2O3 surface and the functional moiety, X, dictates the surface properties of the grafted layer. We study the grafting process using in situ Fourier transform infrared spectroscopy and ex situ x-ray photoelectron spectroscopy measurements, and we characterize the surfaces using scanning electron microscopy, atomic force microscopy, and water contact angle measurements. We found that the structure and density of grafted aminosilanes are influenced by their chemical reactivity and steric constraints around the silicon atom as well as by the nature of the anchoring functional groups. Methyl substituted aminosilanes yielded more hydrophobic surfaces with a higher surface density at higher grafting temperatures. Thiol and nitrile terminated silanes were also studied and compared to the aminosilane terminated surfaces. Uniform monolayer coatings were observed for ethoxy-based silanes, but chlorosilanes exhibited nonuniform coatings as verified by atomic force microscopy measurements.

Funder

Energy Frontier Research Centers

National Science Foundation

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

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1. Vapor-phase grafting of functional silanes on atomic layer deposited Al2O3;Journal of Vacuum Science & Technology A;2023-04-24

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