Formation of C–N thin films by ion beam deposition-Reference-Cited by-同舟云学术

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Formation of C–N thin films by ion beam deposition

Published:1995-07 Issue:4 Volume:13 Page:2110-2122
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
language:en
Short-container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

Author:

Boyd K. J.,Marton D.,Todorov S. S.,Al‐Bayati A. H.,Kulik J.,Zuhr R. A.,Rabalais J. W.

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Link

http://avs.scitation.org/doi/pdf/10.1116/1.579528

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