Cross sections of photoacid generators at low electron energies-Reference-Cited by-同舟云学术

Cross sections of photoacid generators at low electron energies

Published:2015-11 Issue:6 Volume:33 Page:06FH01
ISSN:2166-2746
Container-title:Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
language:en
Short-container-title:Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena

Author:

Grzeskowiak Steven¹,Narasimhan Amrit¹,Ostrander Jonathan¹,Schad Jonathon¹,Earley William¹,Brainard Robert L.¹,Denbeaux Greg¹,Ocola Leonidas E.²,Neisser Mark³

Affiliation:

1. College of Nanoscale Science and Engineering–SUNY Polytechnic Institute, 257 Fuller Road, Albany, New York 12203

2. Argonne National Laboratories, 9700 S. Cass Avenue, Lemont, Illinois 60439

3. SUNY Polytechnic Institute–SEMATECH, 257 Fuller Road #2200, Albany, New York 12203

Funder

SEMATECH

SUNY Polytechnic Institute

Publisher

American Vacuum Society

Subject

Materials Chemistry,Electrical and Electronic Engineering,Surfaces, Coatings and Films,Process Chemistry and Technology,Instrumentation,Electronic, Optical and Magnetic Materials

Link

http://avs.scitation.org/doi/pdf/10.1116/1.4935954

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