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Tailoring nanopore formation in atomic layer deposited ultrathin films

  • Published:2018-01 Issue:1 Volume:36 Page:01A103
  • ISSN:0734-2101
  • Container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
  • language:en
  • Short-container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

Author:

Karwal Saurabh1,Li Tao,Yanguas-Gil Angel,Canlas Christian P.,Lei Yu2,Mane Anil U.,Libera Joseph A.,Seifert Soenke,Winans Randall E.,Elam Jeffrey W.3

Affiliation:

1. Department of Applied Physics, University of Technology Eindhoven, P.O. Box 503, Eindhoven 5600MB

2. Department of Chemical and Materials Engineering, University of Alabama in Huntsville, Huntsville, Alabama 35899

3. Energy Systems Division, Argonne National Laboratory, Argonne, Illinois 60439

Funder

U.S. Department of Energy

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics
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