Fabrication of InP-based two-dimensional photonic crystal membrane-Reference-Cited by-同舟云学术

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Fabrication of InP-based two-dimensional photonic crystal membrane

Published:2004 Issue:1 Volume:22 Page:70
ISSN:0734-211X
Container-title:Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
language:en
Short-container-title:J. Vac. Sci. Technol. B

Author:

Xing Aimin,Davanco Marcelo,Blumenthal Daniel J.,Hu Evelyn L.

Publisher

American Vacuum Society

Subject

General Engineering

Cited by 21 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

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4. Record high-aspect-ratio GaAs nano-grating lines grown by Hydride Vapor Phase Epitaxy (HVPE);Journal of Crystal Growth;2013-10

5. Atomic scale study of InP etching by Cl2-Ar ICP plasma discharge;The European Physical Journal Applied Physics;2011-02-22

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