New aspects of nanopotentiometry for complementary metal–oxide–semiconductor transistors-Reference-Cited by-同舟云学术

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New aspects of nanopotentiometry for complementary metal–oxide–semiconductor transistors

Published:2000 Issue:1 Volume:18 Page:586
ISSN:0734-211X
Container-title:Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
language:en
Short-container-title:J. Vac. Sci. Technol. B

Author:

Trenkler T.,Stephenson R.,Jansen P.,Vandervorst W.,Hellemans L.

Publisher

American Vacuum Society

Subject

General Engineering

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