Novel strategy for low-temperature, high-rate growth of dense, hard, and stress-free refractory ceramic thin films-Reference-Cited by-同舟云学术

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Novel strategy for low-temperature, high-rate growth of dense, hard, and stress-free refractory ceramic thin films

Published:2014-07 Issue:4 Volume:32 Page:041515
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
language:en
Short-container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

Author:

Greczynski Grzegorz,Lu Jun,Bolz Stephan,Kölker Werner,Schiffers Christoph,Lemmer Oliver,Petrov Ivan,Greene Joseph E.,Hultman Lars

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Link

http://avs.scitation.org/doi/pdf/10.1116/1.4884575

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