Metal oxide morphology in argon-assisted glancing angle deposition-Reference-Cited by-同舟云学术

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Metal oxide morphology in argon-assisted glancing angle deposition

Published:2012-03 Issue:2 Volume:30 Page:021507
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
language:en
Short-container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

Author:

Sorge J. B.,Taschuk M. T.,Wakefield N. G.,Sit J. C.,Brett M. J.

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Link

http://avs.scitation.org/doi/pdf/10.1116/1.3687204

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